Microlithography: Science and Technology, Second Edition

Author:   Bruce W. Smith ,  Kazuaki Suzuki (Nikon Corporation, Tokyo, Japan)
Publisher:   Taylor & Francis Inc
Edition:   2nd edition
ISBN:  

9780824790240


Pages:   864
Publication Date:   11 May 2007
Replaced By:   9781439876756
Format:   Hardback
Availability:   Awaiting stock   Availability explained


Our Price $416.99 Quantity:  
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Microlithography: Science and Technology, Second Edition


Overview

Full Product Details

Author:   Bruce W. Smith ,  Kazuaki Suzuki (Nikon Corporation, Tokyo, Japan)
Publisher:   Taylor & Francis Inc
Imprint:   CRC Press Inc
Edition:   2nd edition
Dimensions:   Width: 17.80cm , Height: 4.40cm , Length: 25.40cm
Weight:   1.632kg
ISBN:  

9780824790240


ISBN 10:   0824790243
Pages:   864
Publication Date:   11 May 2007
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Replaced By:   9781439876756
Format:   Hardback
Publisher's Status:   Out of Print
Availability:   Awaiting stock   Availability explained

Table of Contents

Reviews

Praise for the First Edition ...The editors have done an excellent job of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this fast-moving field. -International Journal of Electrical Engineering Education


"Praise for the First Edition ""…The editors have done an excellent job of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this fast-moving field."" —International Journal of Electrical Engineering Education"


Praise for the First Edition ...The editors have done an excellent job of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this fast-moving field. -International Journal of Electrical Engineering Education


Author Information

Edited by Kazuaki Suzuki, Nikon Corporation, Saitama, Japan, Saitama, 360-8559, Japan Edited by Bruce W. Smith, Rochester Institute of Technology, New York, USA, Rochester NY, U.S.A

Tab Content 6

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