Overview

This volume contains the proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, held in Columbus, Ohio, USA, in November, 1997. Micro electro mechanical systems (MEMS) is a rapidly-growing industry. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surface chemistry and materials science in the operation and manufacturing of many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The specific aim of this volume was to promote better tribological understanding of MEMS, which should advance the state of the art in micromachining and in the IC industry in general. For example, better understanding will contribute to better performance prediction for micromachined pressure sensors, accelerometers and gyros as well as a better understanding of stiction behaviour of micro-mirrors and micromotors and of the influence of roughness on micro-fluids. This volume should be of interest to researchers, manufacturers and potential users of MEMS and experts in tribology (including mechanics, mechanical properties and surface modification).

Full Product Details

Author:   Bharat Bhushan
Publisher:   Springer
Imprint:   Springer
Edition:   1998 ed.
Dimensions:   Width: 15.50cm , Height: 3.60cm , Length: 23.50cm
Weight:   1.119kg
ISBN:  

9780792350248

ISBN 10:   0792350243
Pages:   655
Publication Date:   30 June 1998
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock  
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Table of Contents

MEMS R&D in Europe.- Integrated MEMS in Conventional CMOS.- Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review.- Microfabrication Technologies for High Performance Microactuators.- Surface Characterization of Non-Lithographic Micromachining.- Biosensors and Microfluidic Systems.- Power MEMS Materials and Structures.- MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization.- New Technology and Applications at Lucas NovaSensor.- Rough Surface Characterization.- Frictional Instabilities.- Wear of Ceramics and Metals.- Mechanics of Wear: From Conventional Components to MEMS.- Rheological Modeling of Thin Film Lubrication.- Surface Roughness Induced Effects in Hydrodynamic Lubrication.- Transition from Elastohydrodynamic to Partial Lubrication.- Micro/Nanotribology: State of the Art and Its Applications.- Pulsed Force Mode: A New Method for Characterizing Thin Silane Films by Adhesive Force Measurements.- Formation of Nanometer-Scale Contacts to Viscoelastic Materials: Implications for MEMS.- Nanotribology of Vapor-Phase Lubricants.- The Tribology of Hydrocarbon Surfaces Investigated Using Molecular Dynamics.- Dual-Axis Piezoresistive AFM Cantilever for Independent Detection of Vertical and Lateral Forces.- Statistical Thermodynamic Treatment of the AFM Tip in Liquid.- Tribological Issues of Polysilicon Surface-Micromachining.- Advantages and Limitations of Silicon as a Bearing Material for MEMS Applications.- Surface Force Induced Failures in Microelectromechanical Systems.- Development, Fabrication and Testing of a Multi-Stage Micro Gear System.- Analysis of Gear Tooth Performance of Mechanically-Coupled, Outer-Rotor Polysilicon Micromotors.- Micro/Nanotribological Studies ofSingle-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices.- Phase Transformations in Semiconductors under Contact Loading.- Influence of Water Adsorption on Microtribology of Micromachines.- Tribological Effects of Surface Roughness in MEMS Devices.- Active Friction Control Using Ultrasonic Vibration.- Contact Resistance Measurements and Modeling of an Electrostatically Actuated Microswitch.- Metrology for MEMS Tribology.- Mechanical Property Determination Using Nanoindentation Techniques.- Stress in Thin Films for MEMS Actuators.- Reliability and Fatigue Testing of MEMS.- Surface Modification and Mechanical Properties of Bulk Silicon.- Microfriction and Microwear Experiments on Metal Containing Amorphous Hydrocarbon Hard Coatings Using an Atomic Force Microscope: Mechanisms, Models and Micro- versus Macrotests.- Formation of Carbon Films on Ceramic Carbides by High Temperature Chlorination.- Deposition and Characterization of Diamond-Like Materials.- Wear and Nanomechanical Studies of Silicon Oxide and Silicon Nitride Thin Films for MEMS Applications.- a-SiC Thin Films Deposited Using Pulsed Laser Ablation of Graphite and Magnetron Sputtering of Silicon onto Steel Substrates at Room Temperature.- Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements.- Tribological Properties of Modified MEMS Surfaces.- Breakout Session Report: Tribology Research in MEMS.- Breakout Session Report: Mechanisms of Nano-Scale Tribology and Instrumentation for MEMS Devices.- Breakout Session Report: Lubricants, Overcoats and Surface Modification Techniques.- Breakout Session Report: Mechanical Property Measurements.- Panel Discussion Report: Tribology Issues and Opportunities in MEMS.- List ofParticipants.- Editor’s Vita.

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