PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing
Author:   Stephen M. Rossnagel (IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York, U.S.A.) ,  Ronald Powell (Novellus Systems, Inc., Palo Alto, California) ,  Abraham Ulman (Polytechnic University, Brooklyn, New York, U.S.A.)
Publisher:   Elsevier Science Publishing Co Inc
Volume:   v. 26
ISBN:  

9780125330268


Pages:   419
Publication Date:   29 October 1998
Format:   Hardback
Availability:   Manufactured on demand   Availability explained
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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing


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Author:   Stephen M. Rossnagel (IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York, U.S.A.) ,  Ronald Powell (Novellus Systems, Inc., Palo Alto, California) ,  Abraham Ulman (Polytechnic University, Brooklyn, New York, U.S.A.)
Publisher:   Elsevier Science Publishing Co Inc
Imprint:   Academic Press Inc
Volume:   v. 26
Dimensions:   Width: 15.20cm , Height: 2.80cm , Length: 22.90cm
Weight:   0.810kg
ISBN:  

9780125330268


ISBN 10:   012533026
Pages:   419
Publication Date:   29 October 1998
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

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Ronald A. Powell. Palo Alto, California. Novellus Systems, Inc., Palo Alto California - Stephen M. Rossnagel. Yorktown Heights, New York. IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York

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