Thin Film Materials Technology: Sputtering of Compound Materials
Author:   Kiyotaka Wasa ,  Makoto Haber ,  Hideaki Adachi ,  Makoto Kitabatake
Publisher:   William Andrew
ISBN:  

9781282027664


Pages:   518
Publication Date:   01 January 2004
Format:   Electronic book text
Availability:   Available To Order   Availability explained
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Thin Film Materials Technology: Sputtering of Compound Materials


Overview

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

Full Product Details

Author:   Kiyotaka Wasa ,  Makoto Haber ,  Hideaki Adachi ,  Makoto Kitabatake
Publisher:   William Andrew
Imprint:   William Andrew
ISBN:  

9781282027664


ISBN 10:   1282027662
Pages:   518
Publication Date:   01 January 2004
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Available To Order   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

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