The Physics of Submicron Lithography
Author:   Kamil A. Valiev
Publisher:   Springer Science+Business Media
Edition:   1992 ed.
ISBN:  

9780306435782


Pages:   493
Publication Date:   31 March 1992
Format:   Hardback
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Our Price $551.76 Quantity:  
Add to Cart

Share |

The Physics of Submicron Lithography


Add your own review!

Overview

Full Product Details

Author:   Kamil A. Valiev
Publisher:   Springer Science+Business Media
Imprint:   Kluwer Academic/Plenum Publishers
Edition:   1992 ed.
Dimensions:   Width: 17.80cm , Height: 2.50cm , Length: 25.40cm
Weight:   2.600kg
ISBN:  

9780306435782


ISBN 10:   0306435780
Pages:   493
Publication Date:   31 March 1992
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

1. Forming Electron Beams of Submicron Cross Section.- 2. The Physics of the Interactions between Fast Electrons and Matter.- 3. The Physics of Ion-Beam Lithography.- 4. The Physics of X-Ray Microlithography.- 5. Optical Lithography.- 6. Procedures for Processing Exposed Resist Films and Resist Mask Topography.

Reviews

Author Information

Tab Content 6

Author Website:  

Customer Reviews

Recent Reviews

No review item found!

Add your own review!

Countries Available

All regions
Latest Reading Guide

MRG2025CC

 

Shopping Cart
Your cart is empty
 Shopping cart
Mailing List

 

Sign up now