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OverviewThe unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing.Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers.Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas. Full Product DetailsAuthor: Vladimir Protopopov (Samsung Electronics Mechatronics Center, South Korea)Publisher: World Scientific Publishing Co Pte Ltd Imprint: World Scientific Publishing Co Pte Ltd ISBN: 9789811257599ISBN 10: 9811257590 Pages: 324 Publication Date: 27 December 2022 Audience: College/higher education , Professional and scholarly , Tertiary & Higher Education , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: In Print ![]() This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |