Spectroscopic Ellipsometry: Principles and Applications
Author:   H Fujiwara
Publisher:   John Wiley & Sons
ISBN:  

9786611002114


Pages:   389
Publication Date:   01 January 2007
Format:   Electronic book text
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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Spectroscopic Ellipsometry: Principles and Applications


Overview

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Full Product Details

Author:   H Fujiwara
Publisher:   John Wiley & Sons
Imprint:   John Wiley & Sons
ISBN:  

9786611002114


ISBN 10:   6611002111
Pages:   389
Publication Date:   01 January 2007
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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