Spectroscopic Ellipsometry and Reflectometry: A User's Guide
Author:   Harland G. Tompkins (Motorola, Inc.) ,  William A. McGahan (Nanometrics, Inc.)
Publisher:   John Wiley & Sons Inc
ISBN:  

9780471181729


Pages:   248
Publication Date:   06 April 1999
Format:   Hardback
Availability:   In Print   Availability explained
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Spectroscopic Ellipsometry and Reflectometry: A User's Guide


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Full Product Details

Author:   Harland G. Tompkins (Motorola, Inc.) ,  William A. McGahan (Nanometrics, Inc.)
Publisher:   John Wiley & Sons Inc
Imprint:   Wiley-Interscience
Dimensions:   Width: 16.00cm , Height: 2.00cm , Length: 24.00cm
Weight:   0.533kg
ISBN:  

9780471181729


ISBN 10:   0471181722
Pages:   248
Publication Date:   06 April 1999
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

Perspective and History. Fundamentals. Optical Properties of Materials and Layered Structures. Instrumentation. The Anatomy of a Reflectance Spectrum. Aspects of Single-Wavelength Ellipsometry. The Anatomy of an Ellipsometric Spectrum. Analytical Methods and Approach. Optical Data Analysis. Quality Assurance. Very Thin Films. Roughness. Appendices. Index.

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Author Information

Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola. William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.

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