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This thesis focuses on the synthesis, characterization, and electrochemical performance of ruthenium dioxide (RuO₂) thin films prepared using the Successive Ionic Layer Adsorption and Reaction (SILAR) method. RuO₂ is a promising electrode material for supercapacitor applications due to its high electrical conductivity, excellent redox activity, and superior specific capacitance. The SILAR technique offers advantages such as low cost, simplicity, room-temperature processing, and precise control over film thickness. Structural, morphological, optical, and electrochemical characterizations were carried out using XRD, XPS, FT-IR, RAMAN, SEM, cyclic voltammetry, and electrochemical impedance spectroscopy. The results demonstrate that SILAR and CBD deposited RuO₂ thin films exhibit enhanced electrochemical performance, making them suitable for next-generation energy storage devices.

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