Semiconductor Micromachining: Techniques and Industrial Applications
Author:   S. A. Campbell ,  H. J. Lewerenz
Publisher:   John Wiley and Sons Ltd
Edition:   Volume 2
ISBN:  

9780471966821


Pages:   408
Publication Date:   26 March 1998
Format:   Hardback
Availability:   In Print   Availability explained
Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock.

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Semiconductor Micromachining: Techniques and Industrial Applications


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Author:   S. A. Campbell ,  H. J. Lewerenz
Publisher:   John Wiley and Sons Ltd
Imprint:   John Wiley & Sons Ltd
Edition:   Volume 2
Dimensions:   Width: 16.40cm , Height: 5.20cm , Length: 24.10cm
Weight:   1.358kg
ISBN:  

9780471966821


ISBN 10:   0471966827
Pages:   408
Publication Date:   26 March 1998
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Out of Print
Availability:   In Print   Availability explained
Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock.

Table of Contents

Volume 2 Anisotrophy and the Micromachining of Silicon A. Campbell, et al. Etch Stops S. Collins Photonic Integrated Circuits, Technology and Concepts R. Matz Monolithically Integrated Sensors for Mechanical Quantities in Standard CMOS Processing H. Offereins, et al. Silicon on Insulators C. Harendt and G. Roos Integrated Sensors and Actuators N. Najaft Smart Sensors N. Najaft and J. Moyne Anodic Oxidation of Silicon as a Low-Temperature Passivation Technique G. Mende Micromachined Optoelectronic Structures and Devices P. Deimel Wet and Dry Etching: A Comparison in the Context of Solid State Electronics Applications K. Bachmann Index

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S. A. Campbell is the editor of Semiconductor Micromachining, Volume 2, Techniques and Industrial Applications, published by Wiley. H. J. Lewerenz is the editor of Semiconductor Micromachining, Volume 2, Techniques and Industrial Applications, published by Wiley.

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