Run-To-Run Control in Semiconductor Manufacturing
Author:   James Moyne (University of Michigan, Ann Arbor, USA) ,  Arnon Max Hurwitz
Publisher:   CRC Press
ISBN:  

9781280652882


Pages:   367
Publication Date:   01 January 2001
Format:   Electronic book text
Availability:   Available To Order   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

Our Price $456.80 Quantity:  
Add to Cart

Share |

Run-To-Run Control in Semiconductor Manufacturing


Overview

Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine runs, thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

Full Product Details

Author:   James Moyne (University of Michigan, Ann Arbor, USA) ,  Arnon Max Hurwitz
Publisher:   CRC Press
Imprint:   CRC Press
ISBN:  

9781280652882


ISBN 10:   1280652888
Pages:   367
Publication Date:   01 January 2001
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Available To Order   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

Table of Contents

Reviews

Author Information

Tab Content 6

Author Website:  

Countries Available

All regions
Latest Reading Guide

NOV RG 20252

 

Shopping Cart
Your cart is empty
 Shopping cart
Mailing List

 

Sign up now