Rapid Thermal Processing of Semiconductors
Author:   Victor E. Borisenko ,  Peter J. Hesketh
Publisher:   Springer Science+Business Media
Edition:   1997 ed.
ISBN:  

9780306450549


Pages:   358
Publication Date:   31 May 1997
Format:   Hardback
Availability:   In Print   Availability explained
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Rapid Thermal Processing of Semiconductors


Overview

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Full Product Details

Author:   Victor E. Borisenko ,  Peter J. Hesketh
Publisher:   Springer Science+Business Media
Imprint:   Plenum Publishing Co.,N.Y.
Edition:   1997 ed.
Dimensions:   Width: 17.80cm , Height: 2.60cm , Length: 25.40cm
Weight:   2.090kg
ISBN:  

9780306450549


ISBN 10:   0306450542
Pages:   358
Publication Date:   31 May 1997
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

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