Rapid Thermal Processing of Semiconductors
Author:   Victor E. Borisenko ,  Peter J. Hesketh
Publisher:   Springer-Verlag New York Inc.
Edition:   Softcover reprint of the original 1st ed. 1997
ISBN:  

9781489918062


Pages:   358
Publication Date:   20 June 2013
Format:   Paperback
Availability:   Manufactured on demand   Availability explained
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Rapid Thermal Processing of Semiconductors


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Overview

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Full Product Details

Author:   Victor E. Borisenko ,  Peter J. Hesketh
Publisher:   Springer-Verlag New York Inc.
Imprint:   Springer-Verlag New York Inc.
Edition:   Softcover reprint of the original 1st ed. 1997
Dimensions:   Width: 15.50cm , Height: 2.00cm , Length: 23.50cm
Weight:   0.587kg
ISBN:  

9781489918062


ISBN 10:   148991806
Pages:   358
Publication Date:   20 June 2013
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

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