Plasma Electronics: Applications in Microelectronic Device Fabrication
Author:   Toshiaki Makabe (Keio University, Minato-ku, Tokyo, Japan) ,  Zoran Lj. Petrović (University of Belgrade, Zemun, Serbia)
Publisher:   Taylor & Francis Ltd
Edition:   3rd edition
ISBN:  

9781041192237


Pages:   389
Publication Date:   14 May 2026
Format:   Hardback
Availability:   In Print   Availability explained
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Plasma Electronics: Applications in Microelectronic Device Fabrication


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Author:   Toshiaki Makabe (Keio University, Minato-ku, Tokyo, Japan) ,  Zoran Lj. Petrović (University of Belgrade, Zemun, Serbia)
Publisher:   Taylor & Francis Ltd
Imprint:   CRC Press
Edition:   3rd edition
Weight:   0.950kg
ISBN:  

9781041192237


ISBN 10:   1041192231
Pages:   389
Publication Date:   14 May 2026
Audience:   College/higher education ,  Professional and scholarly ,  Tertiary & Higher Education ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

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Toshiaki Makabe received his BSc, MSc, and Ph.D. degrees in electrical engineering all from Keio University. He became a Professor of Electronics and Electrical Engineering in the Faculty of Science and Technology at Keio University in 1991. Zoran Lj. Petrović obtained his Master's degree in the Department of Applied Physics, Faculty of Electrical Engineering at the University of Belgrade, and earned his Ph.D. from the Australian National University.

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