Physics of Radiofrequency Capacitive Discharge
Author:   V. P. Savinov (Lomonosov Moscow State University, Moscow, Russia)
Publisher:   Taylor & Francis Ltd
ISBN:  

9780367571627


Pages:   322
Publication Date:   30 June 2020
Format:   Paperback
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Our Price $96.99 Quantity:  
Add to Cart

Share |

Physics of Radiofrequency Capacitive Discharge


Add your own review!

Overview

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

Full Product Details

Author:   V. P. Savinov (Lomonosov Moscow State University, Moscow, Russia)
Publisher:   Taylor & Francis Ltd
Imprint:   CRC Press
Weight:   0.453kg
ISBN:  

9780367571627


ISBN 10:   0367571625
Pages:   322
Publication Date:   30 June 2020
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

Foreword Introduction Abbreviations 1. Main physical properties and characteristics of radiofrequency capacitive discharge 2. Physical properties of near-electrode layers of space charge of RF capacitive discharge 3. Edge effects in the RF capacitive discharge 4. Near-electrode electron beams in RF capacitive discharge 5. Physical properties of RF gas discharge plasma References Index

Reviews

Author Information

V. P. Savinov

Tab Content 6

Author Website:  

Customer Reviews

Recent Reviews

No review item found!

Add your own review!

Countries Available

All regions
Latest Reading Guide

MRG2025CC

 

Shopping Cart
Your cart is empty
 Shopping cart
Mailing List

 

Sign up now