Physics of Radiofrequency Capacitive Discharge
Author:   V. P. Savinov (Lomonosov Moscow State University, Moscow, Russia)
Publisher:   Taylor & Francis Ltd
ISBN:  

9781138600805


Pages:   342
Publication Date:   21 May 2018
Format:   Hardback
Availability:   In Print   Availability explained
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Physics of Radiofrequency Capacitive Discharge


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Overview

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

Full Product Details

Author:   V. P. Savinov (Lomonosov Moscow State University, Moscow, Russia)
Publisher:   Taylor & Francis Ltd
Imprint:   CRC Press
Weight:   0.181kg
ISBN:  

9781138600805


ISBN 10:   1138600806
Pages:   342
Publication Date:   21 May 2018
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

Foreword Introduction Abbreviations 1. Main physical properties and characteristics of radiofrequency capacitive discharge 2. Physical properties of near-electrode layers of space charge of RF capacitive discharge 3. Edge effects in the RF capacitive discharge 4. Near-electrode electron beams in RF capacitive discharge 5. Physical properties of RF gas discharge plasma References Index

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