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OverviewFull Product DetailsAuthor: Ai-Qun LiuPublisher: Taylor & Francis Ltd Imprint: CRC Press Weight: 1.047kg ISBN: 9780367386948ISBN 10: 0367386941 Pages: 502 Publication Date: 19 June 2019 Audience: Professional and scholarly , Professional & Vocational Format: Paperback Publisher's Status: Active Availability: In Print ![]() This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsPhotonic MEMS Devices and Actuators. MEMS Device Control. Optical MEMS and Devices. Micro and Nano Fabrication Techniques.ReviewsAuthor InformationLiu, Ai-Qun Tab Content 6Author Website:Countries AvailableAll regions |