Overview

The multidisciplinary nature of microelectromechanical systems (MEMS) places huge demands on the MEMS designer to have expertise in many areas. Despite the increasing availability of analysis methods and simulation tools for MEMS, the process of conceiving a design or optimizing it is still largely dependent on designer's experience, expertise, and creativity. Synthesis methods, on the other hand, can automatically generate and optimize designs for user-specified requirements saving considerable time. They are capable of new designs that human designers might find it hard to get by manual iteration-based analysis methods. This text is a collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students. This book underscores the importance of synthesis in designing MEMS efficiently and economically.

Full Product Details

Author:   S.G.K. Ananthasuresh
Publisher:   Springer-Verlag New York Inc.
Imprint:   Springer-Verlag New York Inc.
Edition:   2003 ed.
Volume:   13
Dimensions:   Width: 15.50cm , Height: 2.00cm , Length: 23.50cm
Weight:   1.440kg
ISBN:  

9781402076206

ISBN 10:   1402076207
Pages:   320
Publication Date:   30 November 2003
Audience:   General/trade ,  Professional and scholarly ,  College/higher education ,  General ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of print, replaced by POD  
We will order this item for you from a manufatured on demand supplier.

Table of Contents

1 Introduction.- 1. Design of Microelectromechanical Systems.- 2. Synthesis vs. Analysis.- 3. Optimization as a synthesis tool.- 4. Contents of the chapters.- 5. Closure.- 2 Synthesis for Mechanical Behavior.- 1. Introduction.- 2. Synthesis of beam-like structures.- 3. Topology Synthesis.- 4. Synthesis for dynamic attributes.- 5. Conclusions.- 3 Synthesis of Electrostatically Actuated Mems.- 1. Introduction.- 2. Governing Equations.- 3. Shape Synthesis of Electrostatically Driven Actuators.- 4. An Example: Variable Comb-drive Actuators.- 5. Closure.- 4 Synthesis Methods for Electrothermal Actuation.- 1. Introduction.- 2. Generalization of the BasiC electro-thermal actuator.- 3. Modeling.- 4. Synthesis.- 5. Numerical examples.- 6. Alternative implementation using “line elements”.- 7. Advanced example.- 8. MicroFabrication.- 9. Closure.- 5 Synthesis with Piezoelectric Actuation.- 1. Introduction.- 2. Background Theory for Piezoelectricity.- 3. FEM Applied to Piezoelectricity.- 4. Flextensional Actuator Design.- 5. Conclusion.- 6 Synthesis of Piezocomposites.- 1. Piezocomposite Design.- 2. Homogenization Method.- 3. Piezocomposite Design Problem.- 4. Examples.- 5. Conclusions.- 7 Synthesis of Periodic Micro Mechanisms.- 1. Introduction.- 2. Numerical homogenization, FE modeling, and sensitivity analysis.- 3. Formulation of the problem.- 4. Numerical implementation.- 5. Examples.- 6. Wave propagation.- 7. Concluding remarks.- 8 Process Synthesis.- 1. Introduction.- 2. State-space representation.- 3. Planar device representation.- 4. Basic synthesis method.- 5. Cardinality of design space.- 6. Granularity control through condensation.- 7. Other miscellaneous graph-theoretical results.- 8. Process flow construction.- 9. Determination of selective operators.- 10. Processflow parameters.- 11. Software implementation.- 12. Compiler testing.- 13. Summary.- 9 Mask Synthesis.- 1. Introduction.- 2. Related work.- 3. Mathematical framework.- 4. Synthesis.- 5. Examples.- 6. Conclusions.- 10 System-Level Synthesis.- 1. MEMS Design representations.- 2. Synthesis Methodology.- 3. Performance Models.- 4. Synthesis Results.- 5. Summary.

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