Overview

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Full Product Details

Author:   Changhai Ru ,  Xinyu Liu ,  Yu Sun
Publisher:   Springer International Publishing AG
Imprint:   Springer International Publishing AG
Edition:   1st ed. 2016
Dimensions:   Width: 15.50cm , Height: 2.40cm , Length: 23.50cm
Weight:   0.966kg
ISBN:  

9783319238524

ISBN 10:   3319238523
Pages:   409
Publication Date:   07 January 2016
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Manufactured on demand  
We will order this item for you from a manufactured on demand supplier.

Table of Contents

Part I Nanopositoning Technologies.- Fundamentals of Nanopositioning.- Introduction of Piezoelectric Nanopositioning.- Stick-Slip Actuation.- Piezo Motor-Based Nanopositioning Stages.- Flexure-Guided Nanopositioning Stage.- Parallel-Kinematic Nanopositioning Stage.- MEMS Electrostatic Nanopositioning.- MEMS Electromagnetic Nanopositioning.- MEMS Electrothermal Nanopositioning.- High-Speed MEMS Nanopositioning Stage.- Part II Modeling and Control of Nanopositioning Systems.- Hysteresis Model of Piezoelectric Actuator.- Feedforward Control for Nanopositioning.- Tracking Control for Nanopositioning.- Adaptive Inverse Control for Nanopositioning.- Control Issues of MEMS Nanopositioning Devices.- Part III Nanopositioning Applications.- Nanomanipulation Under Scanning Electron Microscope.- Nanopositioning for Storage Applications.- Fast Nanopositioning for AFM.- Nanopositioning for Pohtolithography.- Nanopositioning for Semiconductor Inspection.

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