Nanopositioning Technologies: Fundamentals and Applications
Author:   Changhai Ru ,  Xinyu Liu ,  Yu Sun
Publisher:   Springer International Publishing AG
Edition:   Softcover reprint of the original 1st ed. 2016
ISBN:  

9783319795393


Pages:   409
Publication Date:   30 March 2018
Format:   Paperback
Availability:   Manufactured on demand   Availability explained
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Nanopositioning Technologies: Fundamentals and Applications


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Overview

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Full Product Details

Author:   Changhai Ru ,  Xinyu Liu ,  Yu Sun
Publisher:   Springer International Publishing AG
Imprint:   Springer International Publishing AG
Edition:   Softcover reprint of the original 1st ed. 2016
Dimensions:   Width: 15.50cm , Height: 2.20cm , Length: 23.50cm
Weight:   0.635kg
ISBN:  

9783319795393


ISBN 10:   3319795392
Pages:   409
Publication Date:   30 March 2018
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

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