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9781498725576

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Dr. Sarangan has done an excellent job of providing a practical text for scientists and technologists interested in the principles of nanofabrication. This book would serve as a relatively comprehensive reference text for anyone beginning the journey of creating solutions in the science of very small things. -Greg Peake, Sandia National Laboratories, Albuquerque, New Mexico, USA This book is beneficial to the community of nanoscience and nanotechnology. - Yongyuan Jiang, Harbin Institute of Technology, China Overall, the book is an excellent source for new, as well as, highly experienced engineers in the field of device fabrication. It presents easy to understand descriptions of very complicated processes and techniques. The numerical examples offer tremendous insight into what is physically being done during device fabrication. Dr. Saragan has done an excellent service to the community by authoring this text. - Ronald A. Coutu, Jr., Marquette University, Milwaukee, Wisconsin, USA Graduate students as well as researchers working in cleanrooms developing semiconductors or those working in a cleanroom will be able to use this book as a go-to reference source for many commonly used semiconductor fabrication methods. This is a convenient source of information that is well written and provides lots of useful fabrication data and tips. It will serve as a general reference text on this subject matter. -IEEE Electrical Insulation, November/December 2017

Dr. Sarangan has done an excellent job of providing a practical text for scientists and technologists interested in the principles of nanofabrication. This book would serve as a relatively comprehensive reference text for anyone beginning the journey of creating solutions in the science of very small things. -Greg Peake, Sandia National Laboratories, Albuquerque, New Mexico, USA This book is beneficial to the community of nanoscience and nanotechnology. - Yongyuan Jiang, Harbin Institute of Technology, China Overall, the book is an excellent source for new, as well as, highly experienced engineers in the field of device fabrication. It presents easy to understand descriptions of very complicated processes and techniques. The numerical examples offer tremendous insight into what is physically being done during device fabrication. Dr. Saragan has done an excellent service to the community by authoring this text. - Ronald A. Coutu, Jr., Marquette University, Milwaukee, Wisconsin, USA

""Dr. Sarangan has done an excellent job of providing a practical text for scientists and technologists interested in the principles of nanofabrication. This book would serve as a relatively comprehensive reference text for anyone beginning the journey of creating solutions in the science of very small things."" —Greg Peake, Sandia National Laboratories, Albuquerque, New Mexico, USA ""This book is beneficial to the community of nanoscience and nanotechnology."" — Yongyuan Jiang, Harbin Institute of Technology, China ""Overall, the book is an excellent source for new, as well as, highly experienced engineers in the field of device fabrication. It presents easy to understand descriptions of very complicated processes and techniques. The numerical examples offer tremendous insight into what is physically being done during device fabrication. Dr. Saragan has done an excellent service to the community by authoring this text."" — Ronald A. Coutu, Jr., Marquette University, Milwaukee, Wisconsin, USA

"""Dr. Sarangan has done an excellent job of providing a practical text for scientists and technologists interested in the principles of nanofabrication. This book would serve as a relatively comprehensive reference text for anyone beginning the journey of creating solutions in the science of very small things."" —Greg Peake, Sandia National Laboratories, Albuquerque, New Mexico, USA ""This book is beneficial to the community of nanoscience and nanotechnology."" — Yongyuan Jiang, Harbin Institute of Technology, China ""Overall, the book is an excellent source for new, as well as, highly experienced engineers in the field of device fabrication. It presents easy to understand descriptions of very complicated processes and techniques. The numerical examples offer tremendous insight into what is physically being done during device fabrication. Dr. Saragan has done an excellent service to the community by authoring this text."" — Ronald A. Coutu, Jr., Marquette University, Milwaukee, Wisconsin, USA"

Dr. Sarangan has done an excellent job of providing a practical text for scientists and technologists interested in the principles of nanofabrication. This book would serve as a relatively comprehensive reference text for anyone beginning the journey of creating solutions in the science of very small things. -Greg Peake, Sandia National Laboratories, Albuquerque, New Mexico, USA This book is beneficial to the community of nanoscience and nanotechnology. - Yongyuan Jiang, Harbin Institute of Technology, China Overall, the book is an excellent source for new, as well as, highly experienced engineers in the field of device fabrication. It presents easy to understand descriptions of very complicated processes and techniques. The numerical examples offer tremendous insight into what is physically being done during device fabrication. Dr. Saragan has done an excellent service to the community by authoring this text. - Ronald A. Coutu, Jr., Marquette University, Milwaukee, Wisconsin, USA

Author Information

Andrew Sarangan is a professor and associate director of the Electro-Optics Graduate Program at the University of Dayton, Dayton, Ohio. Dr. Sarangan’s current research interests include semiconductor optoelectronics, nanofabrication, and computational electromagnetics. He has developed graduate courses in nanofabrication,nanophotonics, optical thin films, and integrated optics. He is a senior member of the IEEE and the SPIE and a registered professional engineer in the state of Ohio. He is also an accomplished pilot and a certificated flight instructor.

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