Overview

Advances in micro and nano technology have increased the demand for miniaturized sensors, actuators, and other non-electronic MEMS that require assembly and packaging. Multiscale Robotics for Microsystems Manufacturing presents a new framework in micro automation based on robotic, or robotic-assisted, assembly and packaging. This volume ties concepts in precision engineering, control engineering, and MEMS together in a unique manner. The material covered begins with an introduction to microsystems and applications including heterogeneous MEMS assembly and miniaturization. In order to provide a link between MEMS and robotics, a detailed discussion of precision robotics and micro assembly is presented. This material is followed by a discussion of an automated micro robotic cells for microsystems manufacturing and MEMS assembly, along with design specifications and system architectures.

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9781461446507

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