Overview
This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illustrated, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.
Full Product Details
Author: Raja Nassar ,
Weizhong Dai
Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint: Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Edition: 2003 ed.
Dimensions:
Width: 15.50cm
, Height: 1.70cm
, Length: 23.50cm
Weight: 1.270kg
ISBN: 9783540002529
ISBN 10: 3540002529
Pages: 270
Publication Date: 13 June 2003
Audience:
College/higher education
,
Professional and scholarly
,
Tertiary & Higher Education
,
Professional & Vocational
Format: Hardback
Publisher's Status: Active
Availability: In Print
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Reviews
From the reviews: This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). ... the book provides a fairly complete view of the modeling of microfabrication processes. ... `It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications'. (Gregory Guisbiers, Physicalia, Vol. 26 (1), 2004)
From the reviews: <p> This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). a ] the book provides a fairly complete view of the modeling of microfabrication processes. a ] a ~It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applicationsa (TM). (GrA(c)gory Guisbiers, Physicalia, Vol. 26 (1), 2004)
From the reviews: This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). ... the book provides a fairly complete view of the modeling of microfabrication processes. ... 'It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications'. (Gregory Guisbiers, Physicalia, Vol. 26 (1), 2004)
