Mikrosystemtechnik: Prozessschritte, Technologien, Anwendungen
Author:   Ulrich Hilleringmann
Publisher:   Springer Fachmedien Wiesbaden
Edition:   2006 ed.
ISBN:  

9783835100039


Pages:   274
Publication Date:   25 April 2006
Format:   Paperback
Availability:   In Print   Availability explained
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Mikrosystemtechnik: Prozessschritte, Technologien, Anwendungen


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Full Product Details

Author:   Ulrich Hilleringmann
Publisher:   Springer Fachmedien Wiesbaden
Imprint:   Springer Vieweg
Edition:   2006 ed.
Dimensions:   Width: 14.80cm , Height: 1.70cm , Length: 21.00cm
Weight:   0.454kg
ISBN:  

9783835100039


ISBN 10:   3835100033
Pages:   274
Publication Date:   25 April 2006
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.
Language:   German

Table of Contents

Prozesstechnik.- Basisprozesse der Mikrosystemtechnik.- Sensor- und Aktoreffekte.- Monolithisch integrierte Mikrosysteme.- Hybride Systeme.

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Author Information

Prof. Dr.-Ing. Ulrich Hilleringmann ist Leiter des Fachgebietes Sensorik an der Universität Paderborn und lehrt Halbleitertechnologie, Messtechnik, Sensorik und Prozessmesstechnik.

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