Overview

Microsystems technology encompasses microfabrication techniques and uses a range of expertise from specific design to customized packing and a large range of collective fabrication procedures. This work covers the subject from various aspects, including surface and bulk micromachining, sensors, LIGA microfabrication techniques, electrostatically actuated microactuators and wafer bonding methods. This is followed by a series of case studies dealing with major applications such as RF-MEMS, MOEMS and magnetic microsystems. Finally, the contributions focus on packaging, testing, reliability and failure analysis techniques and CAO tools and methods.

Full Product Details

9781903996478

Table of Contents

Reviews

Author Information

Jumana Boussey is a lecturer at the 'Ecole Nationale Superieure d'Electronique et de Radioelectricite de Grenoble' (ENSERG), which is one of the nine engineering schools that form the Institut Polytechnique de Grenoble (INPG) in France.

Tab Content 6

Customer Reviews

Recent Reviews

Countries Available