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Author:   Vytautas Ostasevicius ,  Rolanas Dauksevicius
Publisher:   Springer
Imprint:   Springer
Edition:   2011 ed.
Volume:   44
Dimensions:   Width: 15.50cm , Height: 1.40cm , Length: 23.50cm
Weight:   1.090kg
ISBN:  

9789048197002

ISBN 10:   9048197007
Pages:   214
Publication Date:   11 November 2010
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Awaiting stock  
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Table of Contents

Foreword.- Preface.- Introduction to Microsystems.- Fabrication Technologies of Microsystems.- Overview.- Nickel Surface Micromachining Technology for Fabrication of Microswitches.- UV Lithography for Fabrication of Micromotors.- Common MEMS Actuators.- Parallel Plate Capacitors.- Comb Drives.- Electrostatic Micromotors.- Electrostatic Microswitches.- Theoretical Background of Multiphysical Interactions Common in Microsystems.- Introduction to Coupled-Field Modeling.- Electrostatic Actuation and Pull-in Instability.- Viscous Air Damping.- Vibro-Impact Interactions.- Experimental Testing of Microsystem Dynamics.- Vibration Excitation Methods.- Optical Techniques for Measurement of Vibrations of Microstructures.- Study of Elastic Vibro-Impact Macrosystems and Microsystems.- Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact.- Macrosystems.- .- Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator.- Numerical Modeling and Analysis of Fluidic-Structural Interaction.- Numerical Modeling and Analysis of Electrostatic-Structural Interaction.- Numerical Modeling and Analysis of Vibro-Impact Interaction.- Numerical Analysis of the Micromotor.- Finite Element Modeling of Micromotor.- Modal Analysis.- Micromotor Control.- Analytical Model of a Micromotor.- Basics of Micromotor Geometry.- Torque Analysis.- Micromotor Design Guidelines.- References.

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