Micromachining: Scanning Probe Lithography
Author:   Lydia Anggraini
Publisher:   Independently Published
ISBN:  

9781090363268


Pages:   82
Publication Date:   13 March 2019
Format:   Paperback
Availability:   Available To Order   Availability explained
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Micromachining: Scanning Probe Lithography


Overview

This book describe how nanoscale resist patterns technology were machined or fabricated on a silicon substrate using a scanning probe microscope (SPM) based on nanolithography (SPNL). The advantage by using this technology is the low cost of nanopatterning device technology can be created, where an atomic force microscope (AFM) is used. Conventional SPNL directly writes nanopatterns using a single probe cantilever.

Full Product Details

Author:   Lydia Anggraini
Publisher:   Independently Published
Imprint:   Independently Published
Dimensions:   Width: 21.60cm , Height: 0.50cm , Length: 27.90cm
Weight:   0.286kg
ISBN:  

9781090363268


ISBN 10:   1090363265
Pages:   82
Publication Date:   13 March 2019
Audience:   General/trade ,  General
Format:   Paperback
Publisher's Status:   Active
Availability:   Available To Order   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

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