MEMS: Design and Fabrication
Author:   Mohamed Gad-el-Hak
Publisher:   Taylor & Francis Inc
ISBN:  

9780849391385


Pages:   664
Publication Date:   29 November 2005
Format:   Hardback
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

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MEMS: Design and Fabrication


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Author:   Mohamed Gad-el-Hak
Publisher:   Taylor & Francis Inc
Imprint:   CRC Press Inc
Dimensions:   Width: 17.80cm , Height: 3.70cm , Length: 25.40cm
Weight:   1.360kg
ISBN:  

9780849391385


ISBN 10:   0849391385
Pages:   664
Publication Date:   29 November 2005
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

Introduction. Materials for Microelectromechanical Systems. MEMS Fabrication. LIGA and Micromolding. X-Ray Based Fabrication. EFAB Technology and Application. Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization and Reliability. Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide. Polymer Microsystems: Materials and Fabrications. Optical Diagnostics to Investigate the Entrance Length in Microchannels. Microfabricated Chemical Sensors for Aerospace Applications. Packaging of Harsh Environment MEMS Devices.

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Mohamed Gad-el-Hak

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