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OverviewA fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices Full Product DetailsAuthor: Wendong Zhang , Xiujian Chou , Tielin Shi , Zongmin MaPublisher: John Wiley & Sons Inc Imprint: John Wiley & Sons Inc Dimensions: Width: 17.30cm , Height: 2.00cm , Length: 24.60cm Weight: 0.658kg ISBN: 9781118717967ISBN 10: 1118717961 Pages: 352 Publication Date: 30 December 2016 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: In Print  This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsReviewsAuthor InformationWENDONG ZHANG, North University of China, China XIUJIAN CHOU, North University of China, China TIELIN SHI, Huazhong University of Science and Technology, China ZONGMIN MA, North University of China, China HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China JING CHEN, Peking University, China LIGUO CHEN, Soochow University, China DACHAO LI, Tianjin University, China CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China Tab Content 6Author Website:Countries AvailableAll regions |
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