Materials Processing by Cluster Ion Beams: History, Technology, and Applications

Author:   Isao Yamada
Publisher:   Taylor & Francis Inc
ISBN:  

9781498711753


Pages:   260
Publication Date:   20 August 2015
Format:   Hardback
Availability:   In Print   Availability explained
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Materials Processing by Cluster Ion Beams: History, Technology, and Applications


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Author:   Isao Yamada
Publisher:   Taylor & Francis Inc
Imprint:   CRC Press Inc
Dimensions:   Width: 15.60cm , Height: 2.00cm , Length: 23.40cm
Weight:   0.498kg
ISBN:  

9781498711753


ISBN 10:   1498711758
Pages:   260
Publication Date:   20 August 2015
Audience:   General/trade ,  College/higher education ,  General ,  Tertiary & Higher Education
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

Ion Beam Technology: Overview and History. History and Milestones of Cluster Beam Development. Development of Cluster Beam Sources for Solid Materials. Gas Cluster Ion Beam Equipment. Cluster Ion-Solid Surface Interaction Kinetics. Cluster Ion Beam Sputtering. Cluster Ion Implantation. Cluster Ion Beam-Assisted Deposition. Applications. Conclusions.

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Author Information

Isao Yamada was the originator of the concept for the processing of materials by gas cluster ion beams. He is presently a visiting professor at the Graduate School of Engineering of the University of Hyogo in Japan. He is professor emeritus at Kyoto University, where he was director of the Ion Beam Engineering Experimental Laboratory. He received his Ph.D in electrical engineering from Kyoto University and has held visiting scientist appointments at the FOM Institute in Amsterdam, the Massachusetts Institute of Technology, Cornell University, and Northwestern University. For the past 40 years, his principal areas of research have ranged from fundamental physics to practical applications of materials processing by ion beams, with particular emphasis on very low-energy ion-solid interactions.

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