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OverviewFull Product DetailsAuthor: Isao YamadaPublisher: Taylor & Francis Inc Imprint: CRC Press Inc Dimensions: Width: 15.60cm , Height: 2.00cm , Length: 23.40cm Weight: 0.498kg ISBN: 9781498711753ISBN 10: 1498711758 Pages: 260 Publication Date: 20 August 2015 Audience: General/trade , College/higher education , General , Tertiary & Higher Education Format: Hardback Publisher's Status: Active Availability: In Print ![]() This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsIon Beam Technology: Overview and History. History and Milestones of Cluster Beam Development. Development of Cluster Beam Sources for Solid Materials. Gas Cluster Ion Beam Equipment. Cluster Ion-Solid Surface Interaction Kinetics. Cluster Ion Beam Sputtering. Cluster Ion Implantation. Cluster Ion Beam-Assisted Deposition. Applications. Conclusions.ReviewsAuthor InformationIsao Yamada was the originator of the concept for the processing of materials by gas cluster ion beams. He is presently a visiting professor at the Graduate School of Engineering of the University of Hyogo in Japan. He is professor emeritus at Kyoto University, where he was director of the Ion Beam Engineering Experimental Laboratory. He received his Ph.D in electrical engineering from Kyoto University and has held visiting scientist appointments at the FOM Institute in Amsterdam, the Massachusetts Institute of Technology, Cornell University, and Northwestern University. For the past 40 years, his principal areas of research have ranged from fundamental physics to practical applications of materials processing by ion beams, with particular emphasis on very low-energy ion-solid interactions. Tab Content 6Author Website:Countries AvailableAll regions |