Lithography
Author:   S Landis
Publisher:   John Wiley & Sons Inc
ISBN:  

9781118557662


Pages:   320
Publication Date:   07 March 2013
Format:   Digital
Availability:   Not yet available   Availability explained
This item is yet to be released. You can pre-order this item and we will dispatch it to you upon its release.

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Lithography


Overview

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

Full Product Details

Author:   S Landis
Publisher:   John Wiley & Sons Inc
Imprint:   John Wiley & Sons Inc
Dimensions:   Width: 15.00cm , Height: 1.50cm , Length: 25.00cm
Weight:   3.436kg
ISBN:  

9781118557662


ISBN 10:   1118557662
Pages:   320
Publication Date:   07 March 2013
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Digital
Publisher's Status:   Active
Availability:   Not yet available   Availability explained
This item is yet to be released. You can pre-order this item and we will dispatch it to you upon its release.

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Author Information

Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.

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Latest Reading Guide

NOV RG 20252

 

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