Ion Implantation Technology - 94
Author:   S Coffa ,  G Ferla ,  E Rimini ,  F Priolo
Publisher:   North-Holland
ISBN:  

9781299194229


Pages:   1031
Publication Date:   01 January 1995
Format:   Electronic book text
Availability:   Available To Order   Availability explained
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Ion Implantation Technology - 94


Overview

The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.

Full Product Details

Author:   S Coffa ,  G Ferla ,  E Rimini ,  F Priolo
Publisher:   North-Holland
Imprint:   North-Holland
ISBN:  

9781299194229


ISBN 10:   1299194222
Pages:   1031
Publication Date:   01 January 1995
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Available To Order   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

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