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OverviewThe proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing. Full Product DetailsAuthor: Jiro Matsuo , Masataka Kase , Takaaki Aoki , Toshio SekiPublisher: American Institute of Physics Imprint: American Institute of Physics Edition: 2011 ed. Volume: 1321 Dimensions: Width: 22.10cm , Height: 3.60cm , Length: 27.90cm Weight: 1.456kg ISBN: 9780735408760ISBN 10: 0735408769 Pages: 532 Publication Date: 25 January 2011 Audience: Professional and scholarly , Professional & Vocational Format: Mixed media product Publisher's Status: Active Availability: In Print ![]() This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |