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OverviewThis is the premier world conference for the presentation of the latest advances in ion implantation, from the fundamentals of ion-solid interactions to manufacturing implant equipment. All papers were peer-reviewed. Ion implantation is used to manufacture semiconductor devices. Materials properties are changed by bombarding wafers with atoms, which are accelerated in an ion implanter. Full Product DetailsAuthor: Karen J. Kirkby , Russell M. Gwilliam , Andy Smith , David Chivers, QCPublisher: American Institute of Physics Imprint: American Institute of Physics Edition: 2006 ed. Volume: v. 866 Dimensions: Width: 16.70cm , Height: 1.00cm , Length: 14.50cm Weight: 0.082kg ISBN: 9780735403666ISBN 10: 073540366 Pages: 664 Publication Date: 01 December 2006 Audience: Professional and scholarly , Professional & Vocational Format: CD-ROM Publisher's Status: Active Availability: In Print ![]() This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |