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OverviewThis is the premier world conference for the presentation of the latest advances in ion implantation, from the fundamentals of ion-solid interactions to manufacturing implant equipment. All papers were peer-reviewed. Ion implantation is used to manufacture semiconductor devices. Materials properties are changed by bombarding wafers with atoms, which are accelerated in an ion implanter. Full Product DetailsAuthor: Karen J. Kirkby , Russell M. Gwilliam , Andy Smith , David Chivers, QCPublisher: American Institute of Physics Imprint: American Institute of Physics Volume: v. 866 Dimensions: Width: 21.00cm , Height: 4.10cm , Length: 27.70cm Weight: 1.897kg ISBN: 9780735403659ISBN 10: 0735403651 Pages: 682 Publication Date: 01 December 2006 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: Out of stock ![]() The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |