Integrated Circuit Fabrication
Author:   Shubham Kumar ,  Ankaj Gupta
Publisher:   Taylor & Francis Ltd
ISBN:  

9781032014296


Pages:   336
Publication Date:   29 April 2021
Format:   Hardback
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

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Integrated Circuit Fabrication


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Author:   Shubham Kumar ,  Ankaj Gupta
Publisher:   Taylor & Francis Ltd
Imprint:   CRC Press
Weight:   0.625kg
ISBN:  

9781032014296


ISBN 10:   1032014296
Pages:   336
Publication Date:   29 April 2021
Audience:   College/higher education ,  Tertiary & Higher Education
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

1. Introduction to Silicon Wafer Processing 2. Epitaxy 3. Oxidation 4. Lithography 5. Etching 6. Diffusion 7. Ion Implantation 8. Film Deposition: Dielectric, Polysilicon and Metallization 9. Packaging 10. VLSI Process Integration

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Author Information

Kumar Shubham, Delhi Technical Campus, Uttar Pradesh, India Ankaj Gupta, Delhi Technical Campus, Uttar Pradesh, India

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