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9781009303583

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'Covering the latest advances in chip manufacturing, this is a timely and valuable contribution by two of the leading researchers in the field.' Sanjay Banerjee, The University of Texas at Austin 'Comprehensive and timely. This new edition retains the characteristic balance between fundamental aspects, fabrication details, and simulation specifics. Its historical particulars are both thrilling and stimulating.' Shi-Li Zhang, Uppsala University 'A timely and resourceful edition that addresses semiconductor talent development in the coming years. More than 100 of my undergraduate and graduate students have found this text an enriching resource for expanding their understanding about semiconductor processes.' Muhammad Hussain, Purdue University

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James D. Plummer is a Professor of Electrical Engineering at Stanford University. He has over thirty years of experience in teaching semiconductor fabrication and device physics, and has served on the Board of Directors of companies including Intel and Cadence. He is a Member of the National Academy of Engineering and the American Academy of Arts and Sciences, a Fellow of the Institute of Electrical and Electronics Engineers, and a co-author of Silicon VLSI Technology (2000). Peter B. Griffin is a Senior Research Engineer in Electrical Engineering at Stanford University, and a recognized expert on microfabrication. He has significant hands-on experience in building semiconductor structures, and teaching semiconductor technology courses, at the Stanford Nanofabrication Facility. He is a co-author of Silicon VLSI Technology (2000).

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