Overview

The focus of this text is on practical applications useful to the production line and to the research and development of microelectronics. The background knowledge and significance of doing a particular type of infrared measurement is discussed in detail. The principal purpose of the book is to serve as a useful handbook for practising engineers and scientists in the field of microelectronics.

Full Product Details

Author:   W.S. Lau
Publisher:   World Scientific Publishing Co Pte Ltd
Imprint:   World Scientific Publishing Co Pte Ltd
Dimensions:   Width: 15.50cm , Height: 1.50cm , Length: 22.00cm
Weight:   0.358kg
ISBN:  

9789810223526

ISBN 10:   9810223528
Pages:   150
Publication Date:   28 April 1996
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock  
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

Table of Contents

Introduction to infrared spectroscopy; the properties of infared transparent substrates; the measurement of oxygen and carbon in silicon; the calculation of epitexial layer thickness; the characterization of silicon dioxide and silicon nitride thin films; the characterization of PSG and BPSG; the characterization of amorphous silicon and related materials; miscellaneous applications of infrared spectroscopy in microelectronics.

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