The focus of this text is on practical applications useful to the production line and to the research and development of microelectronics. The background knowledge and significance of doing a particular type of infrared measurement is discussed in detail. The principal purpose of the book is to serve as a useful handbook for practising engineers and scientists in the field of microelectronics.
Full Product DetailsAuthor: W.S. Lau
Publisher: World Scientific Publishing Co Pte Ltd
Imprint: World Scientific Publishing Co Pte Ltd
Dimensions: Width: 15.50cm , Height: 1.50cm , Length: 22.00cm
ISBN 10: 9810223528
Publication Date: 28 April 1996
Audience: College/higher education , Professional and scholarly , Postgraduate, Research & Scholarly , Professional & Vocational
Publisher's Status: Active
Availability: Out of stock
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Table of ContentsIntroduction to infrared spectroscopy; the properties of infared transparent substrates; the measurement of oxygen and carbon in silicon; the calculation of epitexial layer thickness; the characterization of silicon dioxide and silicon nitride thin films; the characterization of PSG and BPSG; the characterization of amorphous silicon and related materials; miscellaneous applications of infrared spectroscopy in microelectronics.
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