Infrared Characterization For Microelectronics
Author:   Wai Shing Lau (Formerly Ntu, S'pore)
Publisher:   World Scientific Publishing Co Pte Ltd
ISBN:  

9789810223526


Pages:   172
Publication Date:   04 October 1999
Format:   Hardback
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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Infrared Characterization For Microelectronics


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Author:   Wai Shing Lau (Formerly Ntu, S'pore)
Publisher:   World Scientific Publishing Co Pte Ltd
Imprint:   World Scientific Publishing Co Pte Ltd
Dimensions:   Width: 15.50cm , Height: 1.50cm , Length: 22.00cm
Weight:   0.358kg
ISBN:  

9789810223526


ISBN 10:   9810223528
Pages:   172
Publication Date:   04 October 1999
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

Table of Contents

Introduction to infrared spectroscopy; the properties of infared transparent substrates; the measurement of oxygen and carbon in silicon; the calculation of epitexial layer thickness; the characterization of silicon dioxide and silicon nitride thin films; the characterization of PSG and BPSG; the characterization of amorphous silicon and related materials; miscellaneous applications of infrared spectroscopy in microelectronics.

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