Overview

The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained with numerous practical examples. Bringing engineering and physics together at the nanoscale reveals some astonishing effects: geometric features such as shape change meaning; roughness can disappear altogether; signals from instruments have to be dealt with differently depending on scale. These and other aspects are dealt with for the first time in this book. It is relevant not only for today's technology but also for future advances. Many aspects of nanotechnology and precision engineering are considered in chapters on manufacture, characterization, standardization, performance and instrumentation. There is a special chapter on nanometrology and this subject permeates the whole book. The Handbook of Surface and Nanometrology is the only book that covers these subject areas and is the definitive work in this field. This book is indispensable for firms making, trading, and researching semiconductor devices, MEMS, and micro-optics, as well as tradition precision engineering products. It will also be useful in quality control as well as for research scientists, development engineers, and production managers.

Full Product Details

9781322614700

Table of Contents

Reviews

Praise for the First EditionHandbook of Surface and Nanometrology contains a wealth of information for both practical and research engineers. For Taylor Hobson, the volume epitomises the nature of the art of surface metrology and instrument engineering, as could only be recorded through a lifetime of dedication to the subject. This book will give both guidance and food for thought for anyone interested in the subject at whatever level. Bruce Wilson, Taylor Hobson The book is very useful to the colleagues of my Institute. It will be one of the best books in our library. Professor Yuri Chugui

Author Information

Regarded as one of the world s top authorities on surface and nanometrology, David J. Whitehouse is professor emeritus of engineering science at the University of Warwick, where he was chief scientist in the School of Engineering. He has also been a consultant to numerous organizations, such as Rolls Royce, Taylor Hobson, Kodak, Unilever, General Motors, Caterpillar, 3M, Toshiba Japan, UBM Germany, and the Atomic Weapons Research Establishment. He has published 5 books and more than 250 technical papers, holds 23 patents, and was founding editor of the first peer-reviewed international journal on nanoscale science and technology, Nanotechnology. Professor Whitehouse has been a recipient of many awards, including the Lifetime Achievement Award from the American Society for Precision Engineering, the Champion of Metrology award from the National Physical Laboratory, and the Commemorative Medallion of the Mendeleev Institute of Metrology.

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