Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS
Author:   Kiyotaka Wasa (Matsushita Electric, Ltd. and Yokohama City University, Japan)
Publisher:   William Andrew Publishing
Edition:   2nd edition
ISBN:  

9781437734836


Pages:   660
Publication Date:   26 October 2012
Format:   Hardback
Availability:   Manufactured on demand   Availability explained
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Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS


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Overview

This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.

Full Product Details

Author:   Kiyotaka Wasa (Matsushita Electric, Ltd. and Yokohama City University, Japan)
Publisher:   William Andrew Publishing
Imprint:   William Andrew Publishing
Edition:   2nd edition
Dimensions:   Width: 15.20cm , Height: 3.40cm , Length: 22.90cm
Weight:   1.030kg
ISBN:  

9781437734836


ISBN 10:   1437734839
Pages:   660
Publication Date:   26 October 2012
Audience:   Professional and scholarly ,  Professional and scholarly ,  Professional & Vocational ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

Table of Contents

Thin Film and Nano-materials Thin Film and Nanomaterial Processes Sputtering Phenomena Computer Simulation of Sputtering Sputtering Systems Deposition of Compound Thin Films Nanometer Materials and Devices Microfabrications

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