Handbook of Silicon Semiconductor Metrology
Author:   C Diebold Alain
Publisher:   Taylor & Francis Group
ISBN:  

9781280208447


Pages:   874
Publication Date:   01 January 2001
Format:   Electronic book text
Availability:   Available To Order   Availability explained
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Handbook of Silicon Semiconductor Metrology


Overview

A description of cleanroom-based measurement technology used during the manufacture of silicon integrated circuits. It covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. It surveys key areas such as optical measurements and in-line calibration methods.

Full Product Details

Author:   C Diebold Alain
Publisher:   Taylor & Francis Group
Imprint:   Taylor & Francis Group
ISBN:  

9781280208447


ISBN 10:   1280208449
Pages:   874
Publication Date:   01 January 2001
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Available To Order   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

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