Handbook of Plasma Immersion Ion Implantation and Deposition
Author:   André Anders
Publisher:   John Wiley & Sons Inc
ISBN:  

9780471246985


Pages:   760
Publication Date:   06 October 2000
Format:   Hardback
Availability:   Out of stock   Availability explained


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Handbook of Plasma Immersion Ion Implantation and Deposition


Overview

This is the first book to describe a family of plasma techniques used to modify the surface and near-surface layer of solid materials.

Full Product Details

Author:   André Anders
Publisher:   John Wiley & Sons Inc
Imprint:   Wiley-VCH Publishers Inc.,U.S.
Dimensions:   Width: 17.30cm , Height: 4.80cm , Length: 25.20cm
Weight:   1.343kg
ISBN:  

9780471246985


ISBN 10:   0471246980
Pages:   760
Publication Date:   06 October 2000
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Out of Print
Availability:   Out of stock   Availability explained

Table of Contents

Introduction (J. Conrad). FUNDAMENTALS. Fundamentals of Plasmas and Sheaths (M. Lieberman). Ion Implantation and Thin-Film Deposition (M. Nastasi, et al.). Fundamentals of Plasma Immersion Ion Implantation and Deposition (B. Wood, et al.). Materials Characterization and Testing Methods-A Brief Survey (K. Walter, et al.). TECHNOLOGY. Design of a PIII&D Processing Chamber (J. Matossian, et al.). Plasma Sources (A. Anders, et al.). Pulser Technology (D. Goebel, et al.). Health and Safety Issues Related to PIII&D (D. Beals, et al.). APPLICATIONS. Nonsemiconductor Applications of PIII&D (K. Sridharan, et al.). Semiconductor Applications (P. Chu, et al.). Appendices. Index.

Reviews

""...provides a state-of-the-art survey of this important technology, and it will be welcomed by researchers and students in surface engineering, materials science, electrical engineering, and related fields."" (E-Streams Vol. 4, No. 3, March 2001)


...provides a state-of-the-art survey of this important technology, and it will be welcomed by researchers and students in surface engineering, materials science, electrical engineering, and related fields. (E-StreamsVol. 4, No. 3, March 2001)


...provides a state--of--the--art survey of this important technology, and it will be welcomed by researchers and students in surface engineering, materials science, electrical engineering, and related fields. (E--StreamsVol. 4, No. 3, March 2001)


. ..provides a state-of-the-art survey of this important technology, and it will be welcomed by researchers and students in surface engineering, materials science, electrical engineering, and related fields. (E-Streams Vol. 4, No. 3, March 2001)


Author Information

André Anders is a Senior Staff Scientist and the Leader of the Plasma Applications Group at Lawrence Berkeley National Laboratory, Berkeley, California. He grew up in East Germany and studied physics in Wroclaw, Poland, Berlin, Germany, and Moscow, Russia. He holds a doctorate degree in physics from Humboldt University, Berlin. From 1987 to 1991 he worked at the Academy of Sciences in East Berlin. After the fall of the Berlin Wall he moved to Berkeley, California, where he joint Berkeley Lab. He is the author of about 200 papers in refereed journals. Dr. Anders serves as an Officer/ Member on several internal conference committees and was elected Fellow of IEEE (USA) and Fellow of the Institute of Physics (UK). He also serves as a member of the Editorial Board of the journal Surface and Coatings Technology.

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