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OverviewThe Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry. Full Product DetailsAuthor: Harland Tompkins (Independent consultant with ties to American Vacuum Society.) , Eugene A Irene (University of North Carolina, Chapel Hill, USA) , Eugene A Haber , Harland G. TompkinsPublisher: William Andrew Publishing Imprint: William Andrew Publishing Dimensions: Width: 15.20cm , Height: 4.60cm , Length: 22.90cm Weight: 1.470kg ISBN: 9780815514992ISBN 10: 0815514999 Pages: 886 Publication Date: 06 January 2005 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Out of Print Availability: Out of print, replaced by POD  We will order this item for you from a manufatured on demand supplier. Table of ContentsPART 1: THEORY OF ELLIPSOMETRY Polarized Light and Ellipsometry Optical Physics of Materials Data Analysis for Spectroscopic Ellipsometry PART 2: INSTRUMENTATION Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer Rotating Polarizer and Analyzer Ellipsometry Polarization Modulation Ellipsometry Multichannel Ellipsometry PART 3: APPLICATIONS SiO2 Films Theory and Application of Generalized Ellipsometry PART 4: EMERGING AREAS VUV Ellipsometry Spectroscopic Infrared Ellipsometry Ellipsometry in Life Sciences IndexReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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