Handbook of Ellipsometry

Author:   Harland Tompkins (Independent consultant with ties to American Vacuum Society.) ,  Eugene A Irene (University of North Carolina, Chapel Hill, USA) ,  Eugene A Haber ,  Harland G. Tompkins
Publisher:   William Andrew Publishing
ISBN:  

9780815514992


Pages:   886
Publication Date:   06 January 2005
Format:   Hardback
Availability:   Out of print, replaced by POD   Availability explained
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Handbook of Ellipsometry


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Author:   Harland Tompkins (Independent consultant with ties to American Vacuum Society.) ,  Eugene A Irene (University of North Carolina, Chapel Hill, USA) ,  Eugene A Haber ,  Harland G. Tompkins
Publisher:   William Andrew Publishing
Imprint:   William Andrew Publishing
Dimensions:   Width: 15.20cm , Height: 4.60cm , Length: 22.90cm
Weight:   1.470kg
ISBN:  

9780815514992


ISBN 10:   0815514999
Pages:   886
Publication Date:   06 January 2005
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Out of Print
Availability:   Out of print, replaced by POD   Availability explained
We will order this item for you from a manufatured on demand supplier.

Table of Contents

PART 1: THEORY OF ELLIPSOMETRY Polarized Light and Ellipsometry Optical Physics of Materials Data Analysis for Spectroscopic Ellipsometry PART 2: INSTRUMENTATION Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer Rotating Polarizer and Analyzer Ellipsometry Polarization Modulation Ellipsometry Multichannel Ellipsometry PART 3: APPLICATIONS SiO2 Films Theory and Application of Generalized Ellipsometry PART 4: EMERGING AREAS VUV Ellipsometry Spectroscopic Infrared Ellipsometry Ellipsometry in Life Sciences Index

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