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OverviewFull Product DetailsAuthor: Frederick Peter Lisowski (Univ Of Tasmania, Australia & Emeritus Professor, Univ Of Hong Kong)Publisher: World Scientific Publishing Co Pte Ltd Imprint: World Scientific Publishing Co Pte Ltd Dimensions: Width: 15.20cm , Height: 2.30cm , Length: 23.00cm Weight: 0.585kg ISBN: 9789810235697ISBN 10: 9810235690 Pages: 432 Publication Date: 16 December 1998 Audience: College/higher education , Professional and scholarly , General/trade , Undergraduate , Postgraduate, Research & Scholarly Format: Paperback Publisher's Status: Active Availability: Out of stock ![]() The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of ContentsIntroduction to infrared spectroscopy; the properties of infared transparent substrates; the measurement of oxygen and carbon in silicon; the calculation of epitexial layer thickness; the characterization of silicon dioxide and silicon nitride thin films; the characterization of PSG and BPSG; the characterization of amorphous silicon and related materials; miscellaneous applications of infrared spectroscopy in microelectronics.ReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |