Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
Author:   Kaiying Wang
Publisher:   Taylor & Francis Ltd
ISBN:  

9781041144960


Pages:   122
Publication Date:   18 December 2025
Format:   Hardback
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

Our Price $204.39 Quantity:  
Add to Cart

Share |

Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems


Overview

Full Product Details

Author:   Kaiying Wang
Publisher:   Taylor & Francis Ltd
Imprint:   CRC Press
Weight:   0.410kg
ISBN:  

9781041144960


ISBN 10:   1041144962
Pages:   122
Publication Date:   18 December 2025
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

Table of Contents

Chapter 1: Introduction to Green Etching in MEMS Manufacturing Chapter 2: Theoretical Foundations and Mechanisms of Etching Chapter 3: Fluorine-Free Dry Etching for MEMS Chapter 4: Advanced Dry Etching Technologies for MEMS Chapter 5: Wet Etching Alternatives for Green MEMS Processing Chapter 6: Electrochemical Etching for Green MEMS Fabrication Chapter 7: Energy-Efficient Plasma Etching Techniques for MEMS Chapter 8: Industrial Adoption and Future Roadmap for Green MEMS Etching

Reviews

Author Information

Kaiying Wang received his PhD in condensed matter physics from the Institute of Physics, Chinese Academy of Sciences. He joined the University of South-Eastern Norway (USN) in 2007 as an associate professor and was promoted to professor in 2010. His research interests focus on micro-fabrication and nanotechnology, electrochemistry, photochemistry and nanodevices for environment and energy applications. For teaching, he has taught the Microfabrication (MFA4000, master) and Nanotechnology (TSE3120, bachelor) at the University of South-Eastern Norway since 2010. Meanwhile, he has participated in several national and European projects related to micro/nano fabrication technology. The related education programmes at USN include: (1) Sensor Systems and Innovation (2) Smart Systems Integrated Solutions, and (3) Micro- and Nano Systems Technology.

Tab Content 6

Author Website:  

Countries Available

All regions
Latest Reading Guide

April RG 26_2

 

Shopping Cart
Your cart is empty
 Shopping cart
Mailing List

 

Sign up now