Fundamental Principles of Engineering Nanometrology
Author:   Richard Leach (National Physical Laboratory, UK)
Publisher:   Elsevier Science & Technology
ISBN:  

9780080964546


Pages:   352
Publication Date:   16 November 2009
Replaced By:   9781455777532
Format:   Hardback
Availability:   In Print   Availability explained
Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock.

Our Price $393.36 Quantity:  
Add to Cart

Share |

Fundamental Principles of Engineering Nanometrology


Overview

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

Full Product Details

Author:   Richard Leach (National Physical Laboratory, UK)
Publisher:   Elsevier Science & Technology
Imprint:   William Andrew
Dimensions:   Width: 19.10cm , Height: 2.30cm , Length: 23.50cm
Weight:   0.880kg
ISBN:  

9780080964546


ISBN 10:   0080964540
Pages:   352
Publication Date:   16 November 2009
Audience:   College/higher education ,  Tertiary & Higher Education
Replaced By:   9781455777532
Format:   Hardback
Publisher's Status:   Out of Print
Availability:   In Print   Availability explained
Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock.

Table of Contents

1. Introduction to metrology for micro- and nanotechnology 2. Some basics of measurement 3. Precision measurement instrumentation - some design principles 4. Length traceability using interferometry 5. Displacement measurement 6. Surface topography measurement instrumentation 7. Scanning probe and particle beam microscopy 8. Surface topography characterisation 9. Co-ordinate metrology 10. Mass and force measurement References Appendix A SI units of measurement and their realisation at NPL Appendix B SI derived units

Reviews

Author Information

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

Tab Content 6

Author Website:  

Countries Available

All regions
Latest Reading Guide

NOV RG 20252

 

Shopping Cart
Your cart is empty
 Shopping cart
Mailing List

 

Sign up now