Overview

This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology. It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It provides an effective portrayal of the industry's characterization and metrology needs and how they are being addressed. It also offers a foundation for further advances in metrology and new ideas for research and development.

Full Product Details

Author:   David G. Seiler ,  Alain C. Diebold ,  Robert McDonald ,  C. Michael Garner
Publisher:   American Institute of Physics
Imprint:   American Institute of Physics
Edition:   2007 ed.
Volume:   v. 931
Dimensions:   Width: 21.60cm , Height: 3.60cm , Length: 27.90cm
Weight:   1.588kg
ISBN:  

9780735404410

ISBN 10:   0735404410
Pages:   592
Publication Date:   01 September 2007
Audience:   College/higher education ,  Postgraduate, Research & Scholarly
Format:   Mixed media product
Publisher's Status:   Active
Availability:   In Print  
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