Electroceramic-Based Mems
Author:   Nava Setter
Publisher:   Springer
ISBN:  

9780387502939


Pages:   436
Publication Date:   15 September 2008
Format:   Undefined
Availability:   Out of stock   Availability explained


Our Price $65.87 Quantity:  
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Electroceramic-Based Mems


Overview

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

Full Product Details

Author:   Nava Setter
Publisher:   Springer
Imprint:   Springer
Dimensions:   Width: 23.40cm , Height: 2.30cm , Length: 15.60cm
Weight:   0.608kg
ISBN:  

9780387502939


ISBN 10:   0387502939
Pages:   436
Publication Date:   15 September 2008
Audience:   General/trade ,  General
Format:   Undefined
Publisher's Status:   Unknown
Availability:   Out of stock   Availability explained

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Latest Reading Guide

NOV RG 20252

 

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