Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization
Author:   R. K. Willardson (WILLARDSON CONSULTING SPOKANE, WASHINGTON) ,  Eicke R. Weber (Fraunhofer-Institut für Solare Energiesysteme ISE, Freiburg, Germany) ,  Constantinos Christofides (University of Cyprus) ,  Gerard Ghibaudo (Labaratoire de Physique des Composants a Semiconducteur)
Publisher:   Elsevier Science Publishing Co Inc
Volume:   v. 46
ISBN:  

9780127521466


Pages:   316
Publication Date:   12 June 1997
Format:   Hardback
Availability:   In Print   Availability explained
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Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization


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Overview

Defects in ion-implanted semiconductors are important and will likely gain increased importance as annealing temperatures are reduced with successive IC generations. Novel implant approaches, such as MdV implantation, create new types of defects whose origin and annealing characteristics will need to be addressed. Publications in this field mainly focus on the effects of ion implantation on the material and the modification in the implanted layer after high temperature annealing. The editors of this volume and Volume 45 focus on the physics of the annealing kinetics of the damaged layer. An overview of characterization tehniques and a critical comparison of the information on annealing kinetics is also presented.

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Author:   R. K. Willardson (WILLARDSON CONSULTING SPOKANE, WASHINGTON) ,  Eicke R. Weber (Fraunhofer-Institut für Solare Energiesysteme ISE, Freiburg, Germany) ,  Constantinos Christofides (University of Cyprus) ,  Gerard Ghibaudo (Labaratoire de Physique des Composants a Semiconducteur)
Publisher:   Elsevier Science Publishing Co Inc
Imprint:   Academic Press Inc
Volume:   v. 46
Dimensions:   Width: 15.20cm , Height: 2.20cm , Length: 22.90cm
Weight:   0.620kg
ISBN:  

9780127521466


ISBN 10:   0127521461
Pages:   316
Publication Date:   12 June 1997
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Out of Print
Availability:   In Print   Availability explained
Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock.

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Prof. Dr. Eicke R. Weber, Fraunhofer-Institut fur Solare Energiesysteme ISE, Freiburg, Germany

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