Design and Manufacturing of Active Microsystems
Author:   Stephanus Büttgenbach ,  Arne Burisch ,  Jürgen Hesselbach
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Edition:   2011 ed.
ISBN:  

9783642267383


Pages:   444
Publication Date:   21 March 2014
Format:   Paperback
Availability:   Manufactured on demand   Availability explained
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Design and Manufacturing of Active Microsystems


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Overview

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Full Product Details

Author:   Stephanus Büttgenbach ,  Arne Burisch ,  Jürgen Hesselbach
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint:   Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Edition:   2011 ed.
Dimensions:   Width: 15.50cm , Height: 2.40cm , Length: 23.50cm
Weight:   0.694kg
ISBN:  

9783642267383


ISBN 10:   3642267386
Pages:   444
Publication Date:   21 March 2014
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

Table of Contents

1. Introduction.- 2. Design and Construction.- 3. Guiding and Measuring in Active Microsystems.- 4. Manufacturing and Fabrication.- 5. Microassembly.- 6.Industrial Applications.

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